Given the semiconductor context, this review assumes you are referring to for use in MOS transistor gates, MEMS, or resistive heaters. If you meant a specific commercial product or a different field (e.g., polymer science), please clarify; however, Ga-doped poly-Si is the most plausible "deep review" topic.
| Application | Why Ga? | Status | |-------------|---------|--------| | | Eliminates B penetration through HfO₂ | Research, not production | | Rad-hard CMOS | Less dopant ionization under gamma/neutron flux? (Mixed data) | Experimental | | MEMS thermal actuators | High TCR, CMOS compatibility | Emerging (e.g., thermal inkjet heads) | | Resistive random-access memory (RRAM) electrodes | Ga provides oxygen-gettering effect in some oxide stacks | Lab stage | | Poly-Si emitters in bipolar transistors | Possibly lower base current due to slower diffusion | Replaced by SiGe | g+ poly